A 36nW CMOS Temperature Sensor with <0.1K Inaccuracy and Uniform Resolution

Abstract

This paper presents a 36nW high-accuracy subthreshold oscillator-based temperature sensor in 180nm. The proposed super cut-off contention-free (SCCF) delay cell closely mimics the temperature dependency of a single MOS, leading to bestin-class -0.072/+0.082∘C(±0.27∘C) inaccuracy after 2-(1-) pt calibration. A compact voltage regulator with three native transistors realizes 0.02%/°C line sensitivity and 1mK noise floor. A uniform resolution frequency to digital converter (FDC) keeps the sensing resolution constant across a wide temperature range. In addition to standard testing, the 1-pt calibrated sensor was demonstrated for in-vivo animal body temperature tracking and outperformed off-the-shelf solutions.

Publication
2023 IEEE Symposium on VLSI Circuits
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Wei Wang
Ph.D. Student (started in 2021)
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Liwen Jiang
MECE 2021, now at NVIDIA
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Yumin Su
Ph.D. Student (started in 2023)
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Zhiyu Chen
PhD 2023, now at Apple
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Zhanghao Yu
PhD 2023, now at Intel
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Kaiyuan Yang
Associate Professor of ECE